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Highly sensitive surface acoustic wave magnetic field sensor based on the loss mechanism

Author(s): ORCID




ORCID
ORCID


Medium: journal article
Language(s): English
Published in: Smart Materials and Structures, , n. 5, v. 33
Page(s): 055008
DOI: 10.1088/1361-665x/ad37b3
Abstract:

Currently, the surface acoustic wave (SAW) magnetic field sensing technique utilises the SAW velocity/frequency mechanism of magnetoacoustic interaction as an indicator of the magnetic sensitivity mechanism. However, this method has low sensitivity and poor stability. To address this problem, a dynamic magnetoelastic coupling theoretical model is constructed to theoretically simulate the influence of the ΔE effect of magnetically sensitive thin films on SAW propagation attenuation. This study describes a high-sensitivity SAW magnetic field sensing mechanism based on magnetoacoustic attenuation. The simulation results show a clear relationship between the acoustic propagation loss and external magnetic field, indicating a structure-property relationship. An amorphous soft magnetic material (Fe90Co10)78Si12B10 was used as a magnetically sensitive thin film due to its high permeability, low coercivity (Hc), low hysteresis, ease of magnetisation and demagnetisation. SAW magnetosensitive device operating on a frequency of 200 MHz has been experimentally developed using a standard semiconductor photolithography process. A SiO2 layer was deposited on a 36° YX-LiTaO3 substrate as a waveguide, and a (Fe90Co10)78Si12B10 layer was on the top of the propagation area as a magnetosensitive film. The experimental results showed that the acoustic loss change due to the magnetic field variation was 4.63 dB within a magnetic field range of 0 Oe to ±10 Oe, which agreed with the theoretical results. The sensor had a sensitivity of 0.7546 dB Oe−1 within the range of 0–4 Oe and the lower detection limit of magnetic fields was 0.272 Oe, low hysteresis error of 0.54%, multiple repeatability error of 0.13%, excellent repeatability and stability were achieved in the experiments from the developed sensing device.

Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1088/1361-665x/ad37b3.
  • About this
    data sheet
  • Reference-ID
    10769252
  • Published on:
    29/04/2024
  • Last updated on:
    29/04/2024
 
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