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Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes

Author(s):

Medium: journal article
Language(s): English
Published in: Building and Environment, , n. 8, v. 46
Page(s): 1537-1544
DOI: 10.1016/j.buildenv.2011.01.006
Structurae cannot make the full text of this publication available at this time. The full text can be accessed through the publisher via the DOI: 10.1016/j.buildenv.2011.01.006.
  • About this
    data sheet
  • Reference-ID
    10390850
  • Published on:
    26/11/2019
  • Last updated on:
    26/11/2019
 
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